Nano-Tec silver coated silicon wafers
Nano-Tec silver coated silicon wafers
Introduction
The Nano-Tec silver coated silicon wafers are useful for thin film research, AFM / SPM, nanotechnology, reflectometry and optical applications. The silicon wafers are coated with pure silver over an adhesion layer of Ti. Both Ti and Ag are deposited in a dedicated high vacuum deposition system with electron beam evaporation sources. The silver coating is not atomically flat; there are height differences in the nm range. The available silver coating thicknesses are: 10 nm, 50 nm, 100 nm and 500 nm. Available in three silicon wafer sizes: Ø2”/51mm, 3”/76mm and Ø4”/100mm). The Nano-Tec silver coated wafers are individually packed in wafer carrier trays for protection.
Specifications of the Nano-Tec silver coated silicon wafers:
Silver coating |
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Coating film Ag, 99.99% purity |
10 nm |
50 nm |
100nm |
500nm |
Adhesion film Ti, 99.98% purity |
2 nm |
5 nm |
5 nm |
7.5 nm |
Surface roughness |
Several nm |
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Si wafer substrate |
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Si substrate Orientation |
<100> |
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Si wafer Type |
P (Boron) with one primary flat |
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Resistance |
1-30 Ohm/cm |
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Si wafer size |
Ø 2”/51 mm |
Ø3”/76mm |
Ø4”/100mm |
Si wafer thickness |
275µm (+/- 25µm) |
381µm (+/- 25µm) |
525µm (+/- 20µm) |
TTV |
=< 20µm |
=< 20µm |
=< 20µm |
Primary Flat |
15.9 +/- 1.65mm |
22.2 +/- 3.17mm |
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Ordering information for Nano-Tec silver coated silicon wafers with 10nm silver coating
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