Cressington 208HRD High resolution turbo sputter coater
High resolution, high vacuum turbo pumped sputter coater for FESEM, Microprobe, Microprobe and EDX/WDX applications


Cressington 208HRD high resolution turbo sputter coater
       Cressington-208C high vacuum carbon coater with MTM-20 thickness monitor
              Cressington-208HRD high resolution sputter coater with R-P-T stage,
              shutter, turbo pump and MTM-20 thickness monitor

 

The updated Cressington 208HRD high resolution turbo sputter coater has been specifically developed to coat samples for high resolution FE-SEM imaging and analysis. This compact, versatile, modular turbo sputter coating system can be easily configured to offer real solutions for optimum coating of difficult samples. FE-SEM samples need very thin, fine-grained, uniform and conform conductive coatings to eliminate charging effects and to improve contrast to achieve crisp images. In order to minimize the effects of grain, the Cressington 208HRD offers a full range of coating materials and allows unprecedented control over thickness and deposition conditions.

To mimimize charging effects, the motorized rotary-planetary-tilting (R-P-T) stage and wide range of argon gas pressures allows precise control of the uniformity and conformity of the coating. The high resolution MTM-20 thickness controller with termination facility, enables precise control over the thickness of the coating. Coating materials such as Ir, Cr, Pt/Pd and W allow for thin coatings with grain size below 1 nm. The Cressington 208HRD is supplied complete with a shutter for conditioning of non-precious fine grain targets such Cr and W.


        19-012080 R-P-T stage (Ø150mm)
        19-012080 Motorised R-P-T stage

Cressington 208HRD-150 Vacuum chamber with the R-P-T stage

The Cressington 208HRD vacuum chamber with the R-P-T stage can be configured with different heights. Total height is 165mm and tt consists of an short (Ø150 x 65mm) glass chamber, 70mm high R-P-T-stage in an aluminium collar and two metal spacer rings of 15mm. The telescopic top plate support facilitates different heights. By increasing the distance to the sample, one can reduce the sputter rate; this can be desirable for very thin coating and/or rough samples.

The motorized R-P-T stage includes 4 sample holders which can be selected from the list of options below. The standard sample holders for the R-P-T stage are sample holders for 6 x Ø12.7mm pin stubs. The Crystal head for the MTM-20 thickness controller is attached to the R-P-T stage.

2nd Chamber outfit
Optionally available is a second chamber outfit, which includes the Ø150 x 150mm glass chamber, metal spacer ring and a static table.

 208HRD with Ø 28mm target and target shutter
        208HRD sputter head with
Ø 28mm target and target shutter


Features and benefits of the 208HRD high resolution sputter coater are:

  • Complete, easy to use and quick sputter coating solution
  • Unique high resolution sputter head with constant current control
  • High vacuum system allows for wide choice of target materials
  • Includes shutter for target conditioning
  • Compatible with Cr, W, Ir, Pt/Pd and many more targets
  • Uniform, consistent, precise and reproducible sample coating
  • Precise thickness control with included MTM-20 thickness controller
  • Motorised Planetary-rotary-Tilting stage for uniform and conform coating
  • Ø150 mm practical chamber allows for optimum configurations
  • Oil-free pumping system with turbo/diaphragm pump combination


Specifications of the Cressington 208HRD high resolution turbo sputter coater:

High resolution turbo sputter coater

208 HRD

Product #

19-012200

High resolution sputter head

Cool Planar magnetron, wrap-around dark-space shield
Shutter for target condition, quick target change

Target size

Ø28 x 0.2 to 3.2 mm thick

Target materials

Cr, Pt/Pd, Ir, W, Pt, Au, Au/Pd, Pd and many more- see full list of targets

Chamber size

Ø165 x 150mm with telescopic height adjustment,
65mm short glass chamber, 2 x 15mm H spacer rings.
70 mm H motorized R-P-T stage for variable heights

Sputter supply

Microprocessor based, safety interlock, vacuum independent
constant current control (20, 40, 60 and 80mA)

Control method

Automatic cycle function, manual control
Digital timer, thickness control termination
Coating time 1-600 sec, automatic venting

Analog metering

Vacuum: Atm – 0.001mBar
Current: 0-100mA
Plasma voltage: 0-500V

Thickness controller

MTM-20 included + crystal head on R-P-T stage
Resolution 0.1nm

Sample stage

Motorized R-P-T stage with manual tilt -90 to + 90 degrees
Variable speed rotation, planetary motion, incl. 4 sample holders

High vacuum turbo pump

ISO63 / 67 l/s HiPace 80

Backing pump

MVP020 oil-free diaphragm pump

Pump down

4 x 10-5 mbar in 10 minutes

Ultimate vacuum

8 x 10-6 mbar

Vacuum gauge

Pirani

Dimensions

60 x 60 x 36 cm

Weight incl. pumps

40 kg

Power

230v / 50 Hz / 550W


Quotation information for Cressington 208HRD high resolution turbo sputter coater
Cressington 208HRD high vacuum, high resolution sputter coater for FE-SEM 230V/50Hz Cressington 208HRD high vacuum, high resolution sputter coater for FE-SEM 230V/50Hz
Product # Description request quote
19-012200 Cressington 208HRD high vacuum, high resolution sputter coater for FE-SEM 230V/50Hz
Incl. Cool magnetron sputter head with shutter,
Ø150mm chamber with height adjustment,
R-P-T stage with 4 planetary motion sample tables,
MTM-20 thickness monitor system,
Plasma voltage monitor, prevcision gas leak Compound turbopump with cooling fan,
dry diaphragm backing pump and Pt/Pd target Ø28 x 0.4mm thickness

Cressington 208HRD-180 high vacuum sputter coater for thin film R&D 230V/50Hz<br>
Incl. Sliding/tilting sputter head with shutter,<br> Ø10mm chamber with height adjustment,<br>
R-T (Rotary-Tilting) stage with substrate table,<br> MTM-10 thickness monitor system,<br>
Plasma voltage monitor, prevcision gas leak Compound turbopump with cooling fan,<br>
dry diaphragm backing pump 1.2 m3/hr. Uses target size Ø28mm (0.2-3.2mm) thickness incl. spacer rings<br>
Target is not included. Cressington 208HRD-180 high vacuum sputter coater for thin film R&D 230V/50Hz
Incl. Sliding/tilting sputter head with shutter,
Ø10mm chamber with height adjustment,
R-T (Rotary-Tilting) stage with substrate table,
MTM-10 thickness monitor system,
Plasma voltage monitor, prevcision gas leak Compound turbopump with cooling fan,
dry diaphragm backing pump 1.2 m3/hr. Uses target size Ø28mm (0.2-3.2mm) thickness incl. spacer rings
Target is not included.
Product # Description request quote
19-012400 Cressington 208HRD-180 high vacuum sputter coater for thin film R&D 230V/50Hz
Incl. Sliding/tilting sputter head with shutter,
Ø10mm chamber with height adjustment,
R-T (Rotary-Tilting) stage with substrate table,
MTM-10 thickness monitor system,
Plasma voltage monitor, prevcision gas leak Compound turbopump with cooling fan,
dry diaphragm backing pump 1.2 m3/hr. Uses target size Ø28mm (0.2-3.2mm) thickness incl. spacer rings
Target is not included.


Ordering information options for 2nd chamber and R-P-T holders for the Cressington
*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Second chamber outfit for 208HRD-150
Second chamber outfit for 208HRD-150 Second chamber outfit for 208HRD-150
Incl. Glass chamber Ø150 x 150mm,
Metal spacer ring Ø150 x 15mm,
Static sample stage with height adjustment to mount into the base plate
Product # Unit Price* Add to Quote / Order
19-012220 each €496,00
Qty:



R-P-T sample holder for 6 x Ø12.7mm standard pin stubs
R-P-T sample holder for 6 x Ø12.7mm standard pin stubs R-P-T sample holder for 6 x Ø12.7mm standard pin stubs
Product # Unit Price* Add to Quote / Order
19-012081 each €105,00
Qty:



R-P-T sample holder for 3 x Ø12.7mm standard pin stubs or 3 x Ø15mm Hitachi M4 stubs
R-P-T sample holder for 3 x Ø12.7mm standard pin stubs or 3 x Ø15mm Hitachi M4 stubs R-P-T sample holder for 3 x Ø12.7mm standard pin stubs or 3 x Ø15mm Hitachi M4 stubs
Product # Unit Price* Add to Quote / Order
19-012088 each €115,00
Qty:



R-P-T sample holder for 1 x Ø25mm / 1 inch sample stubs or mounts
R-P-T sample holder for 1 x Ø25mm / 1 inch sample stubs or mounts R-P-T sample holder for 1 x Ø25mm / 1 inch sample stubs or mounts
Product # Unit Price* Add to Quote / Order
19-012082 each €105,00
Qty:



R-P-T sample holder for 1 x Ø32mm / 1-1/4 inch sample stubs or mounts
R-P-T sample holder for 1 x Ø32mm / 1-1/4 inch sample stubs or mounts
Product # Unit Price* Add to Quote / Order
19-012083 each €105,00
Qty:



R-P-T sample holder for 4 x Ø12.5mm JEOL sample stubs
R-P-T sample holder for 4 x Ø12.5mm JEOL sample stubs
Product # Unit Price* Add to Quote / Order
19-012084 each €185,00
Qty:



RPT sample holder for Ø40mm / 1-1/2inch mounts
RPT sample holder for Ø40mm / 1-1/2inch mounts RPT sample holder for Ø40mm / 1-1/2inch mounts
Product # Unit Price* Add to Quote / Order
19-012086 each €125,00
Qty:



MTM-10/20 Crystal head bracket for Cressington R-P-T stage
MTM-10/20 Crystal head bracket for Cressington R-P-T stage R-P-T sample holder for 6 x Ø12.7mm standard pin stubs
Product # Unit Price* Add to Quote / Order
19-012091 each €115,00
Qty:



Replacement Switch/PCB for Cressington R-P-T and R-T stages
Replacement Switch/PCB for Cressington R-P-T and R-T stages R-P-T sample holder for 6 x Ø12.7mm standard pin stubs
Product # Unit Price* Add to Quote / Order
19-012099 each €265,00
Qty:





Ordering information consumables for the Cressington 208HRD high resolution sputter coater
*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Replacement O-rings for Ø150mm diameter glass chamber Replacement O-rings for Ø150mm diameter glass chamber
Product # Unit Price* Add to Quote / Order
64-012450 pkg/2 €22,00
Qty:

 

Replacement glass chamber Ø150x150mm (108auto/SE, 108carbon/A/SE, 208HR, 208carbon) Replacement glass chamber Ø150x150mm (108auto/SE, 108carbon/A/SE, 208HR, 208carbon)
Product # Unit Price* Add to Quote / Order
64-012452 each €289,00
Qty:

 

Replacement glass chamber Ø150x65mm for R-T and R-P-T stages (108auto/SE, 108carbon/A/SE, 208HR, 208carbon) Replacement glass chamber Ø150x65mm for R-T and R-P-T stages (108auto/SE, 108carbon/A/SE, 208HR, 208carbon)
Product # Unit Price* Add to Quote / Order
64-012453 each €175,00
Qty:

 

Replacement Aluminium distance ring  Ø150x15mm for R-T and R-P-T stages Replacement Aluminium distance ring Ø150x15mm for R-T and R-P-T stages
Product # Unit Price* Add to Quote / Order
64-012455 each €195,00
Qty:

 

Static table with M6 height adjuster for Cressington 108 and 208 systems Static table with M6 height adjuster for Cressington 108 and 208 systems
Product # Unit Price* Add to Quote / Order
64-012456 each €157,50
Qty:

 

Quartz crystals for MTM-10 and MTM-20 thickness measurement systems, 6MHz, Ø14mm Quartz crystals for MTM-10 and MTM-20 thickness measurement systems, 6MHz, Ø14mm
Product # Unit Price* Add to Quote / Order
64-010835 box/10 €123,50
Qty:

 



Ordering information sputter targets for the Cressington 208HRD high resolution sputter coater
*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
Ø28mm disc type high purity EM-Tec sputter targets for Cressington 208 HRD sputter coaters Ø28mm disc type high purity EM-Tec sputter targets for Cressington 208 HRD sputter coaters
Product # Unit Price* Add to Quote / Order
70-AG2810 Silver Sputter Target, Ø28 x 0.25mm Disc, 99.99% Ag
Qty:

each €120,00
70-AP2808 Gold/Palladium Sputter Target, Ø28 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €595,00
70-AP2809 Gold/Palladium Sputter Target, Ø28 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €595,00
70-AP2816 Gold/Palladium Sputter Target, Ø28 x 0.4mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €995,00
70-AP2817 Gold/Palladium Sputter Target, Ø28 x 0.4mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €995,00
70-AU2808 Gold Sputter Target, Ø28 x 0.2mm Disc, 99.99% Au
Qty:

each €595,00
70-AU2816 Gold Sputter Target, Ø28 x 0.4mm Disc, 99.99% Au
Qty:

each €990,00
70-CR2820 Chromium Sputter Target, Ø28 x 0.5mm Disc, 99.95% Cr
Qty:

each €395,00
70-CU2810 Copper Sputter Target, Ø28 x 0.25mm Disc, 99.99% Cu
Qty:

each €95,00
70-FE2804 Iron Sputter Target, Ø28 x 0.1mm, 99.5% Fe
Qty:

each €95,00
70-IN2820 Indium Sputter Target, Ø28 x 0.5mm Disc, 99.99% In
Qty:

each €130,00
70-IR2812 Iridium Sputter Target, Ø28 x 0.3mm Disc, 99.99% Ir
Qty:

each €2975,00
70-IT2899 ITO (Indium Tin Oxide) Sputter Target Ø28 x 3.2mm Disc, including 1.2mm thick copper backing plate, 90/10 Wt% In2O3/SnO2, 99.99%
Qty:

each €990,00
70-MG2808 Magnesium Sputter Target, Ø28 x 0.20mm Disc, 99.99% Mg
Qty:

each €75,00
70-MO2820 Molydenum Sputter Target, Ø28 x 0.5mm Disc, 99.95% Mo
Qty:

each €245,00
70-NB2820 Niobium Sputter Target, Ø28 x 0.5mm Disc, 99.98% Nb
Qty:

each €245,00
70-NI2803 Nickel Sputter Target, Ø28 x 0.075mm, 99.98% Ni
Qty:

each €95,00
70-PD2808 Palladium Sputter Target, Ø28 x 0.2mm Disc, 99.99% Pd
Qty:

each €525,00
70-PD2816 Palladium Sputter Target, Ø28 x 0.4mm Disc, 99.99% Pd
Qty:

each €624,00
70-PP2808 Platinum/Palladium Target, 80/20 wt% Pt/Pd, Ø28 x 0.2mm Disc, 99.99% Pt/Pd
Qty:

each €595,00
70-PP2816 Platinum/Palladium Target, 80/20 wt% Pt/Pd, Ø28 x 0.4mm Disc, 99.99% Pt/Pd
Qty:

each €995,00
70-PT2808 Platinum Sputter Target, Ø28 x 0.2mm Disc, 99.99% Pt
Qty:

each €515,00
70-PT2816 Platinum Sputter Target, Ø28 x 0.4mm Disc, 99.99% Pt
Qty:

each €890,00
70-SN2820 Tin Sputter Target, Ø28 x 0.50mm Disc, 99.99% Sn
Qty:

each €100,00
70-TA2820 Tantalum Sputter Target, Ø28x 0.5mm Disc, 99.99% Ta
Qty:

each €295,00
70-TI2810 Titanium Sputter Target, Ø28 x 0.2mm Disc, 99.99% Ti
Qty:

each €95,00
70-WO2820 Tungsten Sputter Target, Ø28x 0.5mm Disc, 99.95% W
Qty:

each €245,00
70-ZN2820 Zinc Sputter Target, Ø28 x 0.5mm Disc, 99.5% Zn
Qty:

each €55,00

 





SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  Product Menu with Images
  SEM Sample Stubs
  Carbon Tabs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments / Cathodes
  Silicon Finder Grid
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Instruments

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Cryo Supplies

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  EDS / WDS Calibration
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Vacuum Supplies

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Sample Coating Supplies

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Evaporation Supplies

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  AFM/SPM Disc Pick-up Tool
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Light Microscopy

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